| WTi/Au |
| Typical Applications |
Devices processed at high temperatures, such as Au/Ge eutectic bonding temps |
| Advantages |
Film withstands excursions to 450°C |
| Disadvantages |
Barrier layer recommended for eutectics |
| Temperature Guidelines |
450°C for 30 minutes |
| Pb/Sn, Au/Sn Solderability |
Possible diffusion/enrichment |
| Allowable Die Attach Methods |
· Epoxies · Au/Ge eutectic · Au/Si eutectic · Au/Sn solder · Pb/In eutectic |
| Typical TCR |
n/a |
| Front Side Metal |
· Sputtered WTi 300-500Å · Sputtered Au 20-300µ" |
| Back Side Metal |
Same as front side |
| |
| WTi/Ni/Au |
| Typical Applications |
Devices processed at higher temperatures requiring a solderable film |
| Advantages |
Film withstands brief excursions to 325°C |
| Disadvantages |
Wire bonding problems may be possible due to Ni-Au diffusion when devices processed > 300°C |
| Temperature Guidelines |
300°C for 120 minutes |
| Pb/Sn, Au/Sn Solderability |
Good |
| Allowable Die Attach Methods |
· Pb/Sn solder · Au/Sn solder · Epoxies · Pb/In eutectic |
| Typical TCR |
n/a |
| Front Side Metal |
· Sputtered WTi 300-500Å · Sputtered Ni 2,000-5,000Å · Sputtered Au 20-300µ" |
| Back Side Metal |
Same as front side |
| |
| WTi/Au/Cu/Ni/Au |
| Typical Applications |
High conductivity film allowing for wire bonding and/or soldering after high temp. processing |
| Advantages |
· High conductivity film · Pb/Sn & Au/Sn solderable |
| Disadvantages |
Wire bonding problems may be possible due to Ni-Au diffusion when devices processed > 300°C |
| Temperature Guidelines |
300°C for 120 minutes |
| Pb/Sn, Au/Sn Solderability |
Good |
| Allowable Die Attach Methods |
· Pb/Sn solder · Au/Sn eutectic · Epoxies · Pb/In eutectic |
| Typical TCR |
n/a |
| Front Side Metal |
· Sputtered WTi 300-500Å · Sputtered Cu 40µ" · Electroplated Cu 40-2000µ" · Electroplated Ni 50-150µ" · Electroplated Au 50-250µ" |
| Back Side Metal |
Same as front side |
| |
| TaN/WTi/Au |
| Typical Applications |
Devices processed at high temperatures, such as Au/Ge eutectic bonding temps |
| Advantages |
· Film withstands excursions to 450°C · Passivated TaN films offer good humidity resistance |
| Disadvantages |
· Not Pb/Sn or Au/Sn Solderable · Should be fully sputtered in order to provide blister free films |
| Temperature Guidelines |
Stabilize resistors at 425°C for 30.120 minutes |
| Pb/Sn, Au/Sn Solderability |
Poor |
| Allowable Die Attach Methods |
· Epoxies · Au/Ge eutectic · Au/Si eutectic · Au/Sn eutectic · Pb/In eutectic |
| Typical TCR |
-100 ± 50 ppm/°C |
| Front Side Metal |
· Sputter 10-200 Ω/sq. TaN · Sputtered WTi 300-500Å · Sputtered Au 20-300µ" |
| Back Side Metal |
Same as front side without the TaN layer |
| |
| TaN/WTi/Ni/Au |
| Typical Applications |
Devices processed at higher temperatures requiring a solderable film |
| Advantages |
· Pb/Sn & Au/Sn solderable · Passivated TaN films offer good humidity resistance |
| Disadvantages |
Wire bonding problems may be possible due to Ni-Au diffusion when devices processed > 300°C |
| Temperature Guidelines |
Stabilize resistors at 325°C for 60 minutes |
| Pb/Sn, Au/Sn Solderability |
Good |
| Allowable Die Attach Methods |
· Pb/Sn solder · Au/Sn solder · Epoxies · Pb/In eutectic |
| Typical TCR |
-100 ± 50 ppm/°C |
| Front Side Metal |
· Sputter 10-200 Ω/sq. TaN · Sputtered WTi 300-500Å · Sputtered Ni 2,000-5,000Å · Sputtered Au 20-300µ" |
| Back Side Metal |
Same as front side without the TaN layer |
| |
| NiCr/Ni/Au |
| Typical Applications |
Designs requiring precision resistors with low TCR's |
| Advantages |
Low TCR's (0 ± 50 ppm/°C) · Pb/Sn & Au/Sn solderable |
| Disadvantages |
Wire bonding problems may be possible due to Ni-Au diffusion when devices processed > 300°C |
| Temperature Guidelines |
Stabilize resistors at 325°C for 60 minutes |
| Pb/Sn, Au/Sn Solderability |
Good |
| Allowable Die Attach Methods |
· Pb/Sn solder · Au/Sn solder · Epoxies · Pb/In eutectic |
| Typical TCR |
0 ± 50 ppm/°C |
| Front Side Metal |
· Sputter 50-200 Ω/sq. NiCr · Sputtered Ni 2,000-5,000Å · Sputtered Au 20-300µ" |
| Back Side Metal |
Same as front side (NiCr for adhesion only) |
| |